Microelectromechanical Systems (MEMS) integrate electrical and mechanical components with feature sizes in the micrometer-scale, which can be fabricated using integrated circuit batch-processing technologies (Gad-el-Hak, 2001). The development of devices using MEMS has important advantages such as small size, light weight, low-power consumption, high sensitivity and high resolution (Herrera-May et al., 2009a). MEMS have allowed the development of several microdevices such as accelerometers (L. Li et al., 2011), gyroscopes (Che et al., 2010), micromirrors (Y. Li et al., 2011), and pressure sensors (Mian & Law, 2010). Recently, some researchers (Mohammad et al., 2010, 2011a, 2011b; Wang et al., 2011) have integrated acceleration, pressure or temperature sensors using MEMS. A potential market for MEMS will include magnetic field microsensors for applications such as automotive industry, telecommunications, medical and military instruments, and consumer electronics products (Lenz & Edelstein, 2006).
This work presents the development of resonant magnetic field microsensors based on MEMS that exploit the Lorentz force principle. It describes the general performance, advantages, drawbacks, challenges and future applications of the resonant magnetic field microsensors.
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The indicator on many Photomicrosensors lights when light is incident. Some Photomicrosensors have specific models on which the indicator lights when light is interrupted. When lighting the indicator for position adjustment applications of Slot-type Sensors, for example, it may be more convenient to use a model that lights the indicator when light is interrupted. When using the indicator to check the power supply status, on the other hand, it may be convenient to use a model that lights the indicator when light is incident.
Supercapacitors represent a critical energy storage device technology for applications which require higher power density and/or cycle lifetime than existing battery technologies. Micro-scale supercapacitors, in particular, can enable novel applications in autonomous, wireless microsensors and microelectronics. If these micro-supercapacitors can be fabricated in a planar, on-chip geometry, the energy storage and the devices to be powered can be integrated on a single chip, improving scalability and reducing cost. The primary components of a supercapacitor are the electrodes and electrolyte. The properties of the electrode and electrolyte materials have a significant effect on device performance, and thus, there is significant opportunity for engineering materials to improve the energy density, power density, cycle lifetime, cost, safety, manufacturability, and harsh environment performance of micro-supercapacitors. Furthermore, these properties could be intelligently tailored for specific applications. 2ff7e9595c
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